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The application of polymeric thin film planar optical waveguide based on attenuated total reflection (ATR) and thermo-optic effect as temperature sensor is demonstrated in this paper and the factors influencing sensitivity of the temperature sensor are comprehensively analyzed.Combined by theoretical analysis and experimental investigation,we show that the sensitivity of this temperature sensor is controlled not only by the thicknesses of both cladding layer and waveguide layer and the optical loss of the polymer material,but also by the order of propagating guided modes of the waveguide.The sensor can work in TEO mode or higher-order TE modes which depend on the thickness of waveguide.We systematically investigated the relationship between reflectivity and temperature which is in accord with good linear relationship in 36-43 C and find that the slope value about reflectivity and temperature which stands for the sensitivity of polymer thin film temperature sensor is nearlv same in 36-43 0C and in thickness 1330-4090 nm of guiding layer that we studied.