Meso-plasmas produced at a moderate pressure level,e.g.,0.1~10 Torr[1]or 1~100 Torr[2],have outstanding features,such as low gas temperature,high number densities of reactive species and chemical reactivity,large plasma volume,compared with the counterparts of atmospheric thermal plasmas and low-pressure cold plasmas.And these key meso-plasma parameters would influence the plasma materials processing significantly[2].