The reaction mechanism of the fluorine atom reaction with silane molecule (SiH4) is investigated in this work.Two reaction channels which form SiH3+HF and SiH3F+H are discussed.The geometries and frequencies of all the stationary points along the reaction channels were obtained by MP2/6-311G** method and the energies of all the stationary points were improved by single-point energy calculations using QCISD(T) method.