Mode Transition in Inductive Discharges and the Interaction of the Capacitive and Inductive Coupling

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:Joetty
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It is well known that inductively coupled plasmas have two excitation mechanisms,capacitive (E) mode and inductive (H) mode.
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