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本文用亲电性腐蚀液、“静置”腐蚀法腐蚀实芯丝铅玻璃微通道板的芯料,并用扫描电镜和X射线能谱仪分析其形貌和化学成份。结果表明,用本腐蚀法可获得内壁光滑、增益高、噪声低的通道板。 文中还提出了一种测量腐蚀速度的新方法。测量结果可靠、重复性好。
In this paper, the core material of solid lead-lead glass microchannel plate was etched by electrophilic etching solution and “standing” etching method, and its morphology and chemical composition were analyzed by scanning electron microscopy and X-ray energy dispersive spectroscopy. The results show that the corrosion method can be obtained smooth inner wall, high gain, low noise channel plate. In this paper, a new method of measuring corrosion rate is also proposed. The measurement results are reliable and repeatable.