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净化系统把高效过滤器放在末端的做法,既有好处也有坏处,一旦末端发生漏泄(而这几乎是不可避免的),则其后再无保障体系,将产生无可挽回的后果,特别是对于单向流的高级别的洁净室。本课题提出的阻漏概念就是通过在末端设置亚高效的阻漏层,可以把原来集过滤、气流分布和堵漏密封要求于一身的高效末端风口移到静压箱外的一定位置上去并大大减少其数量(对于单向流),使其只管过滤作用,而把气流分布作用由阻漏层承担,并且把末端的密封要求大大简化。本文推导出的漏泄方程表明,一个针孔的漏泄可使气流浓度比无漏泄时高出475倍。同时从另一个角度证明了射流理论中的浓度公式。本文又推导出阻漏方程,表明阻漏层可使污染气流浓度降到无阻漏层时的5%左右。阻漏层的运用成为洁净室的新型气流分布方式的核心。
The practice of putting a high-efficiency filter on the end of a purification system has both advantages and disadvantages. Once a leak occurs at the end (and this is almost unavoidable), there will be no irreversible consequences if the system is not to be guaranteed in the future. High-grade clean room for unidirectional flow. The concept of leakage prevention proposed in this topic is to set a sub-efficient leak-blocking layer at the end to move the high-efficiency end tuyere, which is originally required for filtration, air distribution and plugging sealing, to a certain position outside the static pressure box and greatly Reduce the number (for unidirectional flow) so that it only acts as a filter, and the distribution of gas flow is borne by the barrier layer, and the sealing requirements at the end are greatly simplified. The leakage equation derived in this paper shows that leakage of one pinhole can make the gas flow concentration 475 times higher than without leakage. At the same time, the concentration formula in the jet theory was proved from another point of view. This paper also deduced the leakage equation, which shows that the leakage layer can reduce the concentration of contaminated airstream to about 5% without a barrier layer. The use of a barrier layer has become the core of the new air distribution method for clean rooms.