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建立了重粒子在阴极鞘层中输运的理论模型 ,推导出离子、中性粒子入射阴极表面速度分布函数和到达阴极的离子流、中性粒子流的解析表达式 .理论结果与蒙特 卡罗模拟相一致 .
The theoretical model of transport of heavy particles in the cathode sheath was established and the analytical expressions of ion velocity, neutral ion flux and neutral ion flux arriving at the cathode were deduced.The theoretical results were in agreement with Monte Carlo The simulation is consistent.