论文部分内容阅读
为了充分掌握纳米操纵中的微观摩擦规律,消除微观摩擦对纳米操纵的不利影响,该文利用原子力显微镜(AFM)的超微探针作为操纵工具,对具有优异力学和电学特性的碳纳米管在不同的表面状况下进行了剪切和操纵。实验中发现,当基底的表面成分和表面形貌不同的时候,操纵过程中的微观摩擦力会有明显的变化。从与光刻技术相结合的操纵实验中可以看出,光刻后残留的光刻胶会大大增加碳纳米管与基底间的微观摩擦力,并加剧操纵工具——AFM针尖的污染与磨损。
In order to fully understand the rules of micro-friction in nanomanipulation and eliminate the adverse effects of micro-friction on nanomanipulation, this paper uses the AFM micro-probe as a manipulation tool to study the carbon nanotubes with excellent mechanical and electrical properties in Cut and manipulated under different surface conditions. Experiments found that when the surface composition and surface morphology of the substrate when the manipulation of the micro-friction will have significant changes. It can be seen from the manipulation experiments combined with photolithography that the residual photoresist after photolithography will greatly increase the micro-friction between the carbon nanotubes and the substrate and aggravate the pollution and wear of the AFM tool tip.