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采用直流磁控溅射法分别在纳米晶体钛(nano-grained Ti,NG Ti)和粗晶粒工业纯钛(coarse-grained commercial pure Ti,CG Ti)表面沉积TiO2薄膜,用扫描电镜、原子力显微镜和X射线衍射仪分析了薄膜的表面形貌和晶体结构,用摩擦试验机、划痕仪和纳米压痕仪测量两种基材表面薄膜的摩擦学性能、膜/基界面结合力、纳米硬度。系统研究了钛基材微结构纳米化对薄膜形核、生长、晶体结构和力学性能的影响规律。结果表明:钛基材微结构纳米化,显著提高薄膜形核率,细化薄膜晶粒;显著促进薄膜由锐钛矿相向金红石相转变;大幅度提高薄膜纳米硬度、界面结合力、摩擦学性能。
TiO2 thin films were deposited on the surfaces of nano-grained Ti (NG Ti) and coarse-grained commercial pure Ti (CG Ti) by direct current magnetron sputtering. Scanning electron microscopy, atomic force microscopy The surface morphology and crystal structure of the films were analyzed by X-ray diffractometer. The tribological properties, film-substrate interfacial adhesion, nano-hardness . The effects of nano-structure of titanium substrate on the nucleation, growth, crystal structure and mechanical properties of the films were studied systematically. The results show that the microstructure of titanium substrate is nano-sized, the nucleation rate of the film is remarkably increased and the grain size of the thin film is refined; the transition from anatase phase to rutile phase is significantly promoted; the nano-hardness, interfacial adhesion and tribological properties .