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以光发射产额谱仪为主的综合谱仪真空系统由三个真空室组成,即分析室、样品制备室和进样室。对前两个室要求极限压强不大于2.7×10~(-8)Pa,对进样室则要求1.33×10~(-4)Pa。该仪器除要求清洁无油外,其分析室工作期间不许用离子泵,以免杂散离子干扰产额谱仪的测量,在非工作期间要求维持不劣于1.33×10~(-6)Pa的压强,以便工作时启动某些泵就能很快达到工作压强。
The integrated spectrometer vacuum system with light emission yield spectrometer consists of three vacuum chambers, namely analysis chamber, sample preparation chamber and injection chamber. For the first two chambers, the ultimate pressure is not more than 2.7 × 10 ~ (-8) Pa, while for the injection chamber, 1.33 × 10 ~ (-4) Pa is required. In addition to being clean and oil-free, the instrument should not be operated with an ion pump during its working period to prevent spurious ions from interfering with the measurement of the yield spectrometer. It is required to maintain a non-inferiority of less than 1.33 × 10 -6 Pa during off- Pressure, in order to start some pumps at work will be able to quickly work pressure.