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采用扩展的Nijboer-Zernike(NZ)方法的逆运算,由焦平面区域的两幅强度图像,获得激光光束出瞳面的振幅信息和相位信息,进而给出激光光束质量因子M2、束宽、束散角、瑞利长度。构建了满足精度要求的实验系统,对一个He-Ne激光器在两天内进行两次测试。将得到的波前相位与相位差异法得到的波前相位进行比较,证明激光波前相位测试结果合理;将得到的特征值数据与M2-200s-FW型激光光束分析仪得到的数据进行比较,证明激光光束特征值测试结果合理。对比两天测试结果,说明该测试系统是稳定可靠的。
In the inverse of the extended Nijboer-Zernike (NZ) method, the amplitude and phase information of the exit pupil of the laser beam are obtained from two intensity images in the focal plane region, and then the laser beam quality factor M2, beam width, beam Angle, Rayleigh length. An experimental system was constructed to meet the accuracy requirements. Two He-Ne lasers were tested in two days. The wavefront phase obtained by the phase difference obtained by phase difference between the wavefront phase comparison proves that the laser wavefront phase test results reasonable; the eigenvalue data obtained and M2-200s-FW laser beam analyzer data comparison, Prove that the laser beam eigenvalue test results are reasonable. Comparison of two days test results, indicating that the test system is stable and reliable.