硅集成传感器是目前几年传感器方面发展一个重要趋势.传感器和信息处理可集成在同一芯片上,提高了传感器的灵敏度、信噪比,可靠性,容易实现批量生产,小型化、成本低、而且可直接与控制系统相接、应用方便.利用半导体集成电路工艺手段,光刻技术、掺杂、名向异性、同性腐蚀,各种特殊敏感材料的沉积、涂敷等,形成硅的微机械结构,如:槽、悬梁、薄膜、孔、桥以及沉积和涂敷热敏、压敏、磁敏、光敏、离子敏材料组成各种类型的传感器;压力传感器、加速度传感器; Silicon integrated sensor is an important trend in sensor development in recent years. Sensors and information processing can be integrated on the same chip, which improves the sensitivity, signal-noise ratio and reliability of the sensor, and is easy to realize mass production, miniaturization and low cost, and Can be directly connected with the control system, easy to use.Using semiconductor integrated circuit technology, lithography, doping, anisotropic, homosexual corrosion, the deposition of a variety of special sensitive materials, coating, the formation of micro-mechanical structure of silicon , Such as: tank, cantilever, film, hole, bridge and deposition and coating of thermal, pressure sensitive, magnetic, photosensitive, ion sensitive materials composed of various types of sensors; pressure sensors, acceleration sensors;