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硅基沉积氮化镓，碳化硅，Ⅲ-Ⅴ族及其合金材料是近年来的研究热点．氮化镓，碳化硅及其Ⅲ—Ⅴ材料在光电子和电子元件领域有着广泛的应用．例如大功率，高速器件，大型激光器，紫外探测器等等．尽管硅基片具有低成本，大的尺寸和极好的电热导性能等优点，硅基片仍没有成为氮化镓，
硅基沉积氮化镓，碳化硅，Ⅲ-Ⅴ族及其合金材料研究进展
【摘 要】
：
硅基沉积氮化镓，碳化硅，Ⅲ-Ⅴ族及其合金材料是近年来的研究热点．氮化镓，碳化硅及其Ⅲ—Ⅴ材料在光电子和电子元件领域有着广泛的应用．例如大功率，高速器件，大型激光器，紫外探测器等
【机 构】
：
夏普美国实验室
【出 处】
：
无机材料学报
【发表日期】
：
2008年2期
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