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甚长波红外波段富含大气湿度、CO2含量及云层结构和温度轮廓等大量信息,是大气遥感的重要组成部分.设计了一种32×32甚长波红外焦平面阵列,采用在ZnCdTe衬底上液相外延生长的As掺杂p型材料上进行B+离子注入形成光敏元,通过铟柱倒焊技术和带有改进型背景抑制结构的读出电路互联,制成截止波长达到14μm的焦平面器件.该红外焦平面器件像元面积为60μm×60μm,工作温度在50 K温度下.测试结果显示:读出电路性能良好,焦平面黑体响应率达到1.35×107 V/W,峰值探测率为2.57×1010 cmHz1/2/W,响应率非均匀性约为45%,盲元率小于12%.“,”Very long wave infrared ( VLWIR ) band is widely used for the remote atmosphere sounding applications, particularly for humidity, CO2 levels, cloud structure and temperature distribution. A 32 ×32 VLWIR HgCdTe focal plane array (FPA) was designed. The photosensitive component was fabricated by B+ ion implanting As-doped p-type material of liquid phase epitaxial growth on ZnCdTe substrate . The readout integrated circuit ( ROIC ) used a buffered direct injection ( BDI ) structure with an improved background suppression . The VLWIR focal plane array ( FPA ) was achieved by combining the HgCdTe detector with ROIC in terms of indium bump bonds, the cutoff wavelength of which was over 14μm. The pixel occupied an area of 60μm×60μm. It could be operated at the temperatures of 50 K. The test results show that the peak detectivity and blackbody responsivity of PFAs are 2.57 ×1010 cmHz1/2/W and 1.35 ×107 V/W, respectively. The nonuniformity of responsivity is about 45%, and dead pixels ratio is less than 12%.