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本文介绍了电磁卡盘的设计和计算方法,并通过试验,指出多极式电磁卡盘优于单极式电磁卡盘。附图7幅,表6个。
This paper introduces the design and calculation of the electromagnetic chuck, and through experiments, points out that the multi-pole electromagnetic chuck is superior to the unipolar electromagnetic chuck. Figure 7 Figure, Table 6.