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采用磁控溅射法在碳化硅(SiC)颗粒表面成功制备了金属钼(Mo)涂层,分析了Mo涂层的成分和形貌;为改善初始涂层成分和形貌,对镀Mo改性SiC复合粉体进行了不同工艺的结晶化热处理,重点研究了热处理对SiC颗粒表面Mo涂层形貌和成分的影响。结果表明,磁控溅射法能够在SiC颗粒表面沉积Mo涂层,随磁控溅射时间的延长,SiC颗粒表面Mo涂层的粗糙度增大,但磁控溅射后SiC颗粒表面Mo涂层为非晶态。热处理能够有效改善SiC颗粒表面Mo涂层的成分、形貌及结晶状态,在600~1200℃之间结晶化热处理过程中,随热处理温度升高,SiC颗粒表面Mo涂层形貌主要经历了以下4个阶段变化:Mo涂层初步致密化—Mo的结晶致密化—Mo涂层的聚集长大—Mo与SiC之间化学反应;相应的Mo原子的存在状态也经历了如下变化:非晶态Mo原子—晶态Mo原子—Mo_2C和MoSi_2。其中800~900℃之间为最佳热处理温度,此时Mo涂层致密均匀包覆完整。SiC表面连续均匀致密的Mo涂层,有利于改善SiC颗粒增强金属基复合材料中基体与增强体之间的界面结合并控制不利界面反应,有利于复合材料综合性能的提高,必将扩大SiC颗粒作为增强体的应用范围。
The metal molybdenum (Mo) coating was successfully prepared on the surface of silicon carbide (SiC) by magnetron sputtering. The composition and morphology of Mo coating were analyzed. In order to improve the composition and morphology of the initial coating, The effects of heat treatment on the morphology and composition of Mo coatings on SiC particles were mainly studied. The results show that the magnetron sputtering method can deposit Mo coating on the surface of SiC particles. With the magnetron sputtering time increasing, the roughness of Mo coating on SiC particles increases. However, the surface of SiC particles after magnetron sputtering Layer is amorphous. Heat treatment can effectively improve the composition, morphology and crystallization state of Mo coating on the surface of SiC particles. During the crystallization heat treatment between 600 and 1200 ℃, with the increase of heat treatment temperature, the morphology of Mo coating on SiC particles mainly has the following 4 phases: Initial densification of Mo coating - Crystallization densification of Mo - Aggregation and growth of Mo coating - Chemical reaction between Mo and SiC; The corresponding existence of Mo atoms also undergoes the following changes: Amorphous Mo atom - crystalline Mo atom - Mo_2C and MoSi_2. Among them, 800 ~ 900 ℃ for the best heat treatment temperature, the Mo coating dense uniform coating complete. The uniform and dense Mo coating on the SiC surface is conducive to improving the interfacial bonding between matrix and reinforcements in SiC particle reinforced metal matrix composites and controlling the unfavorable interfacial reaction, which is conducive to the improvement of comprehensive properties of SiC composites. As a reinforcement body of the scope of application.