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提出一种新型压阻式超高压传感器。用金属膜片、硅油和低量程压阻敏感元件构成传感器,从而实现了利用便宜而常见的较低量程的硅压阻敏感元件构成大量程的高压传感器。给出该传感器工作原理的理论分析和主要结构参数的估算方法。按该文的原理,用20MPa的压阻敏感元件制成了500MPa的高压传感器的原型,其固有频率高达246kHZ,超过了目前同量程的其他传感器,且介绍了原型样机的标定结果,证明其原理的可行性。最后提出对这种传感器进一步开发的建议。
A new piezoresistive EHV sensor is proposed. The use of metal diaphragm, silicone oil and low-range piezoresistive sensor components constitute the sensor, thus using the cheaper and common low-range silicon piezoresistive sensor components constitute a large range of high-pressure sensors. The theoretical analysis of the working principle of the sensor and the estimation method of the main structural parameters are given. According to the principle of the article, the prototype of 500MPa high-pressure sensor is made with 20MPa piezoresistive sensor, its natural frequency is as high as 246kHZ, which surpasses other sensors with the same range at present, and introduces the calibration result of the prototype prototype to prove its principle Feasibility. Finally, the suggestion of further development of this kind of sensor is put forward.