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用MOVPE方法在蓝宝石衬底上生长了高纯氮化镓(GaN)外延材料。未掺杂GaN显n型,室温下(300K)背景电子浓度为1.6×1017cm-3,电子迁移率为360cm2/V.s。在195K附近电子迁移率达到峰值,为490cm2/V.s。发现了该材料中存在深施主能级,其离化能约为38meV。
High-purity gallium nitride (GaN) epitaxial material was grown on a sapphire substrate by the MOVPE method. The undoped GaN was n-type. At room temperature (300K), the background electron concentration was 1.6 × 10 17 cm -3 and the electron mobility was 360 cm 2 / V. s. The electron mobility peaked at about 195K and was 490 cm2 / V. s. It is found that there is a deep donor level in this material with an ionization energy of about 38 meV.