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该文提出了声表面波器件有限元/边界元(Finite Element Method/Boundary Element Method,FEM/BEM)模拟的快速计算方法.FEM/BEM方法作为一种全波分析方法,考虑了所有声波模式,能实现对声表面波器件的精确模拟,但FEM/BEM方法一般计算量大而难以实用,国内外已有工作围绕提高FEM/BEM法的计算速度展开.本文将在Ventura工作的基础上,优化占主要计算量的体波贡献.首先对固定的半无限长压电基片的格林函数用分段多项式函数近似,以避免复杂格林函数的反复计算,然后推导出近似后的积分之间的递推关系式,编写递推算法,并通过实例验证了递推算法能达到精度要求且提高了计算速度.最后采用优化后的FEM/BEM程序对一种纵向耦合(Double Mode Saw,DMS)滤波器进行模拟,模拟结果与实验结果吻合.
In this paper, a fast method of FEM / BEM simulation is proposed for the surface acoustic wave device (FEM). As a full-wave analysis method, the FEM / BEM method considers all acoustic modes, However, the FEM / BEM method is difficult to be practically computationally expensive and has been developed at home and abroad to improve the calculation speed of FEM / BEM method.Based on the Ventura’s work, this paper optimizes Which accounts for the main computational burden of body wave.Firstly, the Green’s function of a fixed semi-infinite piezoelectric substrate is approximated by a piecewise polynomial function to avoid the repeated computation of the complex Green’s function and then derive the approximate Push the relation, write the recursive algorithm, and verify the recursive algorithm can reach the precision requirements and improve the computational speed through an example.Finally, we use a modified FEM / BEM program for a double mode Saw (DMS) filter The simulation results are in good agreement with the experimental results.