一、问题的提出光栅技术用于长度、角度的计量目前已相当广泛。由于测量精度不断提高的要求,近年来,改善光电信号的质量问题,引起很多人的关注。这是进一步实现高倍细分,提高测量精度的关键问题。与电感式(如感应同步器)、电容式传感器比较,欲得到高质量的原始信号,应用光栅技术还多一个手段,即光学空间滤波。文献介绍西德蔡司厂的“光电正 First, the issue of raster technology for the length, angle measurement is now quite extensive. Due to the continuous improvement of measurement accuracy requirements, in recent years, improving the quality of optical signals has aroused the concern of many people. This is the key issue to further achieve high-resolution and improve measurement accuracy. Compared with inductive (such as inductive synchronizers), capacitive sensors, to obtain high-quality original signal, the application of grating technology is more than one means, that is, optical spatial filtering. The literature describes the Zeiss plant in West Germany "photoelectric positive