本仪器采用双晶体型式,测量精度优于2％,稳定度高,重复性好。1.双晶体探头结构如图1所示,在探头体内装有使用晶体T_1和比较品体T_2,其间用隔板隔开。蒸发物经过蒸发孔蒸发到使用晶体上,但T_2在隔板上方而不会被蒸镀。假设,真空室的温度不变,晶体上膜厚增加△T时,相当于晶体增加了一个等效厚度△d。其关系为 The instrument uses dual crystal type, measurement accuracy is better than 2%, high stability, good repeatability. 1. Dual crystal probe structure shown in Figure 1, the probe body is equipped with the use of crystal T_1 and comparative objects T_2, with a partition between them. Evaporation through evaporation holes to use the crystal, but T_2 in the top of the separator will not be evaporated. Assuming that the temperature in the vacuum chamber does not change, an increase ΔT in the film thickness is equivalent to adding an equivalent thickness Δd to the crystal. Its relationship is