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传感器是近几年发展起来的一门新兴技术.它可用来替代人的感官,将一系列外界的刺激变为电信号,从而为自动处理设备或计算机控制系统提供必要的信息.半导体气敏传感器作为一种主要的传感器件,已经在人们的家庭生活,社会公共设施,自动控制及国防现代化方面得到了广泛应用,从而越来越为各界所重视.1975年,瑞典的I.LUndstr‘o’m利用Pd金属作为栅极材料制成了一支氢敏MOS传感器.后来Armagarth等人又指出这种器件对H_2S及NH_3也有一定的敏感特性.但多年来,这种Pd栅MOSFET气敏传感器一直是在高温下使用(≥150℃),这不仅给器件的使
Sensor is an emerging technology developed in recent years.It can be used to replace the human senses, a series of external stimuli into electrical signals, so as to provide automatic processing equipment or computer control system to provide the necessary information.Semiconductor gas sensor As a major sensor device, it has been widely used in people’s family life, social public facilities, automatic control and national defense modernization, and has drawn more and more attention from all walks of life. In 1975, Sweden’s I.Lündstr’o ’ m use of Pd metal as a gate material made of a hydrogen sensitive MOS sensor later Armagarth et al pointed out that this device has some sensitivity to H_2S and NH_3.However, this Pd gate MOSFET gas sensor has been for many years Is used at high temperatures (≥ 150 ℃), which not only to the device