论文部分内容阅读
为了测量离轴非球面镜的曲率半径、圆锥系数等参数,提出了一种使用激光跟踪仪快速测量二次非球面的方法。重点介绍了使用激光跟踪仪得到空间三维坐标后的数据处理方法。实验中对一离轴非球面反射镜进行了测量,通过非线性最小二乘拟合得到了其曲率半径及圆锥系数,拟合结果均方根误差(RMSE)约为1.6μm,确定系数约为0.999999954,所得曲率半径及圆锥系数与已有测量方法相差很小。理论分析以及实验结果表明,该方法简单通用,易于实施,数据处理过程快速可靠,适用于二次非球面镜曲率半径等参数的测量。
In order to measure the parameters such as the radius of curvature and the conic coefficient of the off-axis aspheric mirror, a method of rapidly measuring the secondary aspheric surface with a laser tracker is proposed. The data processing method after using the laser tracker to get the space three-dimensional coordinates is introduced emphatically. An off-axis aspheric mirror was measured in the experiment. The radius of curvature and the conic coefficient were obtained by nonlinear least square fitting. The root mean square error of fitting (RMSE) was about 1.6μm and the coefficient of determination was about 0.999999954, the resulting radius of curvature and conic coefficient with the existing measurement method is very small difference. Theoretical analysis and experimental results show that the proposed method is simple and easy to implement, and the data processing is fast and reliable. It is suitable for the measurement of the parameters such as the radius of curvature of the secondary aspherical mirror.