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采用电子束蒸发镀膜工艺,在不同的基底材料上镀制了Al和Al2O3/Al薄膜,研制了国际热核聚变实验堆光学诊断中用具有较高反射率薄膜第一镜。通过中频脉冲偏压方法产生氢等离子体,对薄膜第一镜在氢等离子溅射下性能及特性进行比较分析。研究结果表明:在本实验氢离子溅射条件下,第一镜样品表面污染物的沉积速度大于溅射速度,样品表面沉积了少量的真空室内物质,通过X射线光电子能谱分析证实金属污染物均为氧化物,对光谱反射率影响较小。而由于基底和膜层结构的不同,薄膜第一镜自身结构的稳定性差异较大,其中Al/SS304和Al2O3/Al/Si O2样件表现出很好的耐等离子溅射稳定性,可以成为第一镜的备选方案。
The Al and Al 2 O 3 / Al thin films were plated on different substrate materials by electron beam evaporation coating technology. The first mirror with higher reflectance film was developed for the optical diagnosis of ITER. Hydrogen plasma was generated by the mid-frequency pulse bias method, and the performance and characteristics of the first mirror of the film under hydrogen plasma sputtering were comparatively analyzed. The results show that under the conditions of hydrogen ion sputtering in this experiment, the deposition rate of the pollutants on the surface of the first mirror sample is greater than the sputtering speed, a small amount of vacuum chamber material is deposited on the surface of the sample, and the metal contaminants are confirmed by X-ray photoelectron spectroscopy All oxides, the spectral reflectance less affected. However, due to the different structure of the substrate and the film, the stability of the first mirror of the film varies greatly. The Al / SS304 and Al2O3 / Al / Si O2 samples show good resistance to plasma sputtering and can be The first mirror alternative.