利用离子束增强沉积技术， 在 Ｓｉ （１１１） 和 Ｇ Ｃｒ１５ 轴承钢基体上沉积 Ｃｒ Ｎ 镀层研究氮分压、 Ｎ＋ ＋ Ｎ＋２ 离子轰击能量和 Ｎｉｏｎｓ Ｃｒ ａｔｏｍｓ 到达比对镀层组织结构的影响结果表明， Ｃｒ Ｎ 镀层组织对氮分压敏感， 随着氮分压的增加， 镀层中 Ｃｒ Ｎ 组份增加， 金属 Ｃｒ 及 Ｃｒ２ Ｎ 组份减少； 随着氮离子轰击能量的增加， Ｃｒ Ｎ 镀层中 Ｃｒ Ｎ （２００） 择优生长； 但当 Ｎｉｏｎｓ Ｃｒ ａｔｏｍｓ 比从１４５ ×１０ － ２ 增至５８７ ×１０ － ２ 时， 镀层中 Ｃｒ Ｎ 组份非但没有增多， 反而使镀层中的 Ｃｒ 以 Ｃｒ２ Ｏ３ 形态存在 The deposition of CrN coatings on Si (111) and G Cr15 bearing steel substrates by ion beam enhanced deposition technique was used to study the effects of nitrogen partial pressure, N + + N + 2 ion bombardment energy and Nions  Cr atoms arrival ratio on the microstructure of coatings The results show that the microstructure of CrN coating is sensitive to the partial pressure of nitrogen. With the increase of partial pressure of nitrogen, the content of Cr N in the coating increases, while the content of Cr and Cr2N decreases. With the increase of nitrogen ion bombardment energy, However, when the Nions  Cr ratio increased from 145 × 10 - 2 to 587 × 10 - 2, the CrN content in the coating increased not only but the content of CrN The Cr is present in the form of Cr 2 O 3