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利用反应磁控溅射法在SiC长纤维表面沉积了(Al+Al_2O_3)扩散阻挡涂层,研究了沉积工艺参数对涂层的成分、沉积速率的影响,以及涂层对SiC纤维的表面残余应力及力学性能的影响.结果表明,随着溅射功率的增加,Al_2O_3涂层的沉积速率先迅速增加后缓慢增加;随着工作气压的增加,Al_2O_3涂层的沉积速率先缓慢降低,在工作气压到达一定值时,沉积速率快速下降随后缓慢下降.沉积的(Al+Al_2O_3)复合涂层保护了SiC纤维的富C层,起到了保证纤维与Al_2O_3涂层之间结合力的作用;激光Raman谱显示改性后纤维的表面残余应力有降低趋势.室温和高温处理后复合丝的拉伸强度分别是计算值的97.69%和98.77%,涂层对纤维的力学性能影响很小.
The (Al + Al_2O_3) diffusion barrier coating was deposited on the surface of the SiC filament by reactive magnetron sputtering. The effects of deposition parameters on the composition and deposition rate of the coating were investigated. The surface residual stress The results show that with the increase of sputtering power, the deposition rate of Al 2 O 3 coating increases rapidly and then increases slowly. With the increase of working pressure, the deposition rate of Al 2 O 3 coating decreases slowly at the working pressure When the deposition rate reaches a certain value, the deposition rate decreases rapidly and then decreases slowly.The deposited Al + Al_2O_3 composite coating protects the C-rich layer of SiC fibers and plays a role in ensuring the binding force between the fibers and the Al_2O_3 coating. The laser Raman spectrum The results showed that the surface residual stress of the modified fibers tended to decrease, and the tensile strength of the composite fibers treated at room temperature and high temperature were 97.69% and 98.77% of the calculated values, respectively. The coating had little effect on the mechanical properties of the fibers.