一、前言随着微波技术的迅速发展,半导体微波技术在整机中的应用日益广泛。现代化的整机要求半导体微波技术开辟一些更高的频段以增加通信容量,降低噪声、提高功率以扩大通信距离以及改善工艺以提高可靠性和坚固性。必须指出,在微波频段由于分布电容和寄生参数的存在,管芯管壳电路之间是互相制约的,因此使微波器件部件化、分机化是半导体微波器件发展的必然趋势。当前国外大力发展超级元件和分机的意义也就在这里。微波器件可分为有源半导体器件和无源半导体器件两类。前者包括晶体管、场效应 I. INTRODUCTION With the rapid development of microwave technology, the application of semiconductor microwave technology in the whole machine is increasingly widespread. Modern complete machine requirements semiconductor microwave technology to open up some higher frequency band to increase communication capacity, reduce noise, increase power to expand the communication distance and improve the process to improve reliability and ruggedness. It must be pointed out that due to the existence of distributed capacitance and parasitic parameters in the microwave frequency band, the shell-and-tube circuits are mutually constrained. Therefore, the partization and extension of microwave devices are the inevitable trend of the development of semiconductor microwave devices. At present, the significance of vigorously developing supercomponents and extensions abroad is also here. Microwave devices can be divided into two types of active semiconductor devices and passive semiconductor devices. The former includes transistors, field effect