【摘 要】
：
以Ａｒ＋１０％Ｈ２（体积分数计）、Ｈ２及Ｎ２为载气，采用射频ＰＣＶＤ技术在４０Ｃｒ钢表面制备了ＢＮ膜；对沉积ＢＮ膜进行了ＦＴＩＲ、ＴＥＭ和ＳＥＭ等分析；并对不同载气下膜与基体的结合力、膜层残余应力、硬度及耐磨性进行了比较．结果表明，ＢＮ膜中ｃ－ＢＮ含量分
【机 构】
：
西安交通大学金属材料强度国家重点实验室,山东工业大学材料科学与工程学院
论文部分内容阅读
以Ａｒ＋１０％Ｈ２（体积分数计）、Ｈ２及Ｎ２为载气，采用射频ＰＣＶＤ技术在４０Ｃｒ钢表面制备了ＢＮ膜；对沉积ＢＮ膜进行了ＦＴＩＲ、ＴＥＭ和ＳＥＭ等分析；并对不同载气下膜与基体的结合力、膜层残余应力、硬度及耐磨性进行了比较．结果表明，ＢＮ膜中ｃ－ＢＮ含量分别为５８．１％、２７．７％和２７．４％，膜厚分别为４．６μｍ、２．０μｍ和３．３μｍ．
BN films were prepared on the surface of 40Cr steel by radio frequency PCVD with Ar + 10% H2 (volume fraction), H2 and N2 as carrier gases. FTIR, TEM and SEM were used to analyze the deposited BN films. The bonding force between the film and the substrate, residual stress of the film, hardness and abrasion resistance were compared. The results showed that the content of c-BN in BN film was 58.1%, 27.7% and 27.4% respectively, and the film thicknesses were 4.6μm, 2.0μm and 3.3μm respectively.
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