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以光发射产额谱仪为主的综合谱仪真空系统由三个真空室组成。其中分析室要求极限压强不大于2.7 × 10-8 Pa;要求清洁无油;在工作期间不许使用离子泵,以免杂散离子干扰产额谱仪的测量,并要求非工作期间能维持不劣于 1.33 × 10-6Pa的压强。以便工作时启动其他获得设备后就能很快达到工作压强。
The integrated spectrometer vacuum system with light emission yield spectrometer consists of three vacuum chambers. Analytical room where the pressure limit is not greater than 2.7 × 10-8 Pa; requires clean and oil-free; Do not use the ion pump during operation to avoid stray ions interfere with the production of the spectrometer measurements, and non-working period can not be maintained Less than 1.33 × 10-6Pa pressure. In order to get work pressure quickly when starting other equipment after work.