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本文探讨了计量圆光栅的精度检测问题,提出了一种新的动态检测方法。它不同于目前普遍采用的标准多面棱体静态检测法,后者只能得到圆光栅静止于圆周内若干等分位置的静态误差,而前者采用频谱分析方法、借助计算机处理,实现对圆光栅动态地、连续测量,最终得到其误差函数R(θ)。本方法采用软件修正技术剔除安装偏心等系统误差,硬件系统使用了高精度的脉冲计数电路,使得检测系统的精度大为提高,并且排除了测量过程中,环境或人为因素对检测精度的影响。本文对这种光栅动态检测技术的原理及应用进行了研究,并给出此方法的精度估计
In this paper, the problem of measuring the accuracy of the circular grating is discussed, and a new dynamic detection method is proposed. It is different from the commonly used standard multi-faceted prism static detection method, the latter can only get the circle grating stationary in the circumference of a number of equal parts of the static error, while the former using spectral analysis, with computer processing, to achieve the circular grating dynamics , Continuous measurement, and finally its error function R (θ). This method uses software correction technology to eliminate system errors such as installation eccentricity. The hardware system uses a high-precision pulse counting circuit, which greatly improves the accuracy of the detection system and eliminates the influence of environmental or human factors on the detection accuracy during measurement. In this paper, the principle and application of this grating dynamic detection technology are studied, and the accuracy of this method is given