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本文讨论了直流PCVD法沉积TiN工艺中温度控制、色泽控制等问题,提出了预防工件过热、确保涂层色泽的工艺措施,还提出了涂层黑斑的成因及消除方法。
In this paper, the temperature control and color control of TiN deposited by direct current PCVD method are discussed. The measures to prevent overheating of the workpiece and ensure the color of the coating are put forward. The causes of formation and elimination of coating dark spots are also proposed.