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在测量表面小倾角时,人们一般使用的是自动准直光管。由于测量区域受到限制,所以要测量大件物体表面局部的倾角变化是较困难的。本文介绍一种测量物体表面小的倾角变化的简单方法,其原理是依据塔尔波特(Talbot)干涉测量法。塔尔波特干涉测量法用于相物体的偏转映射以及测量透镜焦距,已有不少报道。这种方法的灵敏度通过改变两种光栅之
In the measurement of small surface tilt, people generally use the automatic collimator. Due to the limitation of the measuring area, it is difficult to measure the change of the local inclination of the surface of a large-sized object. This article presents a simple way to measure small dip changes on an object’s surface based on the Talbot interferometry. Talbot interferometry has been reported for the deflection mapping of phase objects and the measurement of the focal length of the lens. The sensitivity of this method is changed by changing the two gratings