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用激光化学气相沉积的方法第一次获得荧光膜层氧化铅以及光电导膜层硫化铅,面积为4×15mm~2,厚度分别为0.33μm和0.18μm。测量了其成份、沉积速率、形貌等特性。
For the first time, lead oxide in the phosphor layer and lead sulfide in the photoconductive layer were obtained by laser chemical vapor deposition for the first time, with an area of 4 × 15 mm 2 and thicknesses of 0.33 μm and 0.18 μm, respectively. The composition, deposition rate, morphology and other properties were measured.