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本文介绍了超高真空测试系统的结构特点。测试表明,系统在没有通液氮的情况下,极限真空度为1.8×10~(-11)托,通液氮的情况下,抑制规测得的极限真空度为6×10~(-12)托。测试系统暴露氮气(1大气压)10分钟后经8小时250℃烘烤,钛离子泵起动后3小时真空度为3.4×10~(-11)托。由于极限真空高,该系统能作超高和极高真空规管的对比测试和相对校准,还能作超高真空规管的本底压强的测量。
This article describes the structural features of the ultra-high vacuum test system. The test shows that the ultimate vacuum of the system is 1.8 × 10 ~ (-11) Torr when there is no liquid nitrogen and the limit vacuum degree of inhibition is 6 × 10 ~ (-12) ) Care. The test system was exposed to nitrogen (1 atmosphere) for 10 minutes and baked at 250 ° C for 8 hours. The vacuum degree of the titanium ion pump after 3 hours of starting was 3.4 × 10 ~ (-11) Torr. Due to the high ultimate vacuum, the system enables comparative testing and relative calibration of ultra-high and very high vacuum gauges as well as measurement of background pressure for ultra-high vacuum gauges.