一、前言电感耦合高频等离子体光源(简称ICP光源)是发射光谱分析中新出现的优良光源之一。其优越性早已为光谱分析工作者所公认。目前,ICP发射光谱法在国外正日益得到普及,而在国内也正迅速发展。1961年Reed首先提出了在大气压下产生电感耦合等离子体的方法;1964年,Greenfield、Fassel等分别将电感耦合等离子体应用于光谱分析。此后,特别是1974年后, I. INTRODUCTION Inductively coupled high-frequency plasma light source (referred to as ICP light source) is one of the new excellent light sources in emission spectrum analysis. Its superiority has long been recognized by spectral analysts. At present, ICP emission spectrometry is gaining popularity in foreign countries and is rapidly developing domestically. Reed first proposed in 1961 at atmospheric pressure generated inductively coupled plasma method; 1964, Greenfield, Fassel, respectively, inductively coupled plasma spectrometry. Since then, especially since 1974,