论文部分内容阅读
日本富士电视公司研制成分辨率为0.07μm、液体中的粒度分布亦能测量的粒子计数器。粒子尺寸的测定范围很宽,采用激光柬高速扫描法是该仪器的特点。该计数器可用于工业试剂的品质监视,各种制造工艺的过滤装置及分离膜等的性能检测。精密机械工作油的监视、细菌和酵母的计数等也可使用。由于4Mbit 的动态随机存取存储器的批量生产,以及16Mbit 器件投入研制,使从事此类器件研制工作的半导体厂家对粒子计数器尤为重视。设计宗旨是想对清洗0.8～0.5%μm硅片
Japan’s Fuji Television has developed a particle counter with a resolution of 0.07μm and a particle size distribution in the liquid that can be measured. Particle size measurement range is very wide, the use of high-speed laser scanning Cambodia is the characteristics of the instrument. The counter can be used for quality monitoring of industrial reagents, various manufacturing processes, such as filtration devices and separation membrane performance testing. Monitoring of precision machine oil, counting of bacteria and yeast, etc. are also available. Due to the mass production of 4Mbit dynamic random access memory and the development of 16Mbit devices, the semiconductor manufacturers engaged in the research and development of such devices attach great importance to the particle counter. Designed to clean 0.8 to 0.5% μm wafers