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研制了一种基于微光机电系统(MOEMS)技术的新型微型可编程光栅——周期可调光栅。该光栅采用玻璃体上硅(SOG)加工工艺,静电梳齿驱动,具有操作简单、连续可调和宽调制等特点。该光栅在静电驱动力的作用下,周期的变化引起特定级次下单色光衍射角的变化及复色光光谱的偏移。针对该光栅的衍射特性,设计及搭建两套光学系统,根据光栅结构设计参数的理论计算与测量结果基本一致,充分表明该光栅能对光具有良好的调制作用。为该器件在微型光谱仪和光开关的应用提供了技术参考。
A novel micro-programmable grating based on MOEMS technology has been developed. The grating using glass-on-silicon (SOG) processing technology, electrostatic comb-driven, with simple operation, continuous adjustable and wide modulation and so on. Under the action of electrostatic driving force, the grating changes the diffraction angle of the monochromatic light and the shift of the complex color spectrum at a specific level. According to the diffraction characteristic of the grating, two optical systems are designed and built. The theoretical calculation and measurement results of the grating structure design parameters are basically the same, which fully shows that the grating can modulate the light well. For the device in the micro-spectrometer and optical switch applications provide a technical reference.