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利用蒙特卡罗法.分析了薄膜柱状结构的成因。通过不同工况薄膜生长的计算机模拟,证明了阴影效应和沉积原子有限迁移是导致柱状结构的原因。采用离子束辅助沉积工艺,可使膜层聚集密度明显提高.柱状结构完全消失。
Using Monte Carlo method, the causes of the film columnar structure were analyzed. Computer simulations of film growth under different working conditions show that the shadowing effect and the limited migration of deposited atoms are responsible for the columnar structure. The use of ion beam assisted deposition process, the film can be significantly increased packing density. Columnar structure disappeared completely.