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微悬臂器件被广泛应用于力学显微镜和光力学研究中,实现微悬臂之间的耦合在高精密测量和量子声子网络构建方面具有重要的应用前景。不同于通过电、磁相互作用实现微纳共振器之间耦合的方法,设计并制备了通过结构应力实现耦合的微悬臂阵列。模拟和实验结果表明,这种结构应力耦合微悬臂阵列不仅可以获得较大的耦合强度和较高的力学性能,同时悬臂之间的耦合强度也容易控制。对于其它形式的微纳共振器,同样可以利用结构应力耦合这种方法来实现共振器之间耦合的阵列。
Micro-cantilever devices are widely used in mechanical microscopy and photomechanics research to achieve the micro-cantilever coupling between the high-precision measurement and quantum phonon network construction has important application prospects. Different from the method of realizing the coupling between the micro-nano-resonators by means of electrical and magnetic interaction, a micro-cantilever array that is coupled by structural stress is designed and prepared. The simulation and experimental results show that this kind of structural stress-coupled micro-cantilever array can not only obtain larger coupling strength and higher mechanical properties, but also easily control the coupling strength between cantilevers. For other types of micro-nano resonators, it is equally possible to utilize a method of structural stress coupling to achieve an array of inter-resonator couplings.