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我国自行设计的DMD-450型光学多层镀膜机,已经在北京仪器厂试制成功,并于1974年成批生产。DMD-450型光学多层镀膜机,除了具备一般高真空镀膜机所有的热蒸发源、离子轰击、工件烘烤和旋转等装置外,还带有远聚焦式电子枪和双光路膜厚控制仪。电子枪可以蒸镀各种高熔点的金属和氧化物,由于它避免了蒸镀材料被坩埚污染等问题,从而为制备高纯度和优良光学性能、机械性能的优质薄膜提供了条件。光学膜厚控制仪采用
China’s own design DMD-450 optical multilayer coating machine, has been successfully trial-produced in Beijing Instrument Factory, and in 1974 batch production. DMD-450 optical multi-layer coating machine, in addition to the general high-vacuum coating machine with all the thermal evaporation source, ion bombardment, workpiece baking and rotating devices, but also with a far-focus electron gun and dual optical thickness control device. Electron gun can evaporate all kinds of high melting point metal and oxide, because it avoids the evaporating material is crucible pollution and other issues, which for the preparation of high purity and excellent optical properties, mechanical properties of the quality of the film provided the conditions. Optical thickness control device used