详细地介绍了高精度、微进给永磁直线交流同步电动机（ＰＭＬＳＭ）驱动系统鲁棒位置控制器的设计。首先，在空载情况下，由静态实验获得非线性摩擦系数模型，通过前馈摩擦补偿器补偿非线性摩擦。其次，由递推最小二乘估计器ＲＬＳ和负载扰动力观测器构成的估计器，估计动子质量、粘滞摩擦系数和负载扰动力。设计积分—比例ＩＰ位置控制器以满足跟踪指令和抑制扰动。将观测的负载扰动力前馈，进一步增强系统的鲁棒性。 The design of a robust position control system for a PMLSM drive system with high precision and micro feed is introduced in detail. First of all, under the condition of no-load, a nonlinear friction coefficient model is obtained by static experiment and the nonlinear friction is compensated by the feedforward friction compensator. Secondly, estimator composed of Recursive Least Square Estimator (RLS) and Load Disturbance Observer estimates mover mass, viscous friction coefficient and load disturbing force. Design Integration - Proportional IP position controller to satisfy tracking commands and suppress disturbances. Observe the load disturbance force feedforward, to further enhance the system robustness.