论文部分内容阅读
单晶薄膜在电子学领域里的必要性是越来越明显了。例如对于现在使用的半导体器件,如能采用优质单晶薄膜,其性能将会得到很大的改进;再有在薄膜光电路,薄膜光调制元件,半导体莱塞,用超晶格的负阻元件和量子振荡现象等方面也要用单晶多层薄膜。从前制备这些单晶薄膜采用的是气相和液相外延等方法,这些方法各有优点。今后
The necessity of single crystal thin film in the field of electronics is more and more obvious. For example, for the currently used semiconductor devices, the performance can be greatly improved if a high-quality single crystal thin film is used. In the thin film optical circuit, the thin film light modulating element, the semiconductor lese, the negative resistance element using a superlattice, Quantum oscillation phenomena also need to use single crystal multilayer film. In the past, these single crystal thin films were prepared by methods such as vapor phase and liquid phase epitaxy, each of which has its own merits. from now on