论文部分内容阅读
二氧化钒薄膜特殊的可逆相变特性,决定其有着巨大的应用潜能,由于钒与氧结合可以形成几十种氧化物,因此制得严格化学配比的二氧化钒薄膜始终是一个难点,目前国际上制备此薄膜的方法虽多样化,但都不成熟,实验采用两步工艺,先用射频磁控溅射法制备高纯度的五氧化二钒薄膜,再在N2保护下进行后续热处理,得到二氧化钒含量较高的氧化钒薄膜,并对热处理前后薄膜的成分、形貌进行XRD,XPS,SEM,AFM分析,得出热处理对氧化钒薄膜的成分和形貌的影响。
The special reversible phase change characteristic of vanadium dioxide film determines its great application potential. Since vanadium and oxygen can form dozens of oxides, it is always a difficult point to produce a vanadium dioxide film with a strict chemical ratio. At present, International methods for preparing this thin film are diverse, but are not mature, the experiment using two-step process, the first RF RF magnetron sputtering method to prepare high-purity vanadium pentoxide film, followed by N2 under the protection of the subsequent heat treatment, get The vanadium oxide films with high content of vanadium dioxide and the composition and morphology of the films before and after heat treatment were analyzed by XRD, XPS, SEM and AFM. The influence of heat treatment on the composition and morphology of vanadium oxide films was obtained.