1.前言半导体压力传感器不但比原机械式压力传感器体积小、精度高、成本低,而且具有良好的响应性、重复性、耐振性等优点。三菱公司的半导体压力传感器(图1的 PS103及 PS105型)是以测量汽车发动机进气压力为主要目的的,现已批量生产。此种结构的传感器能适应严酷的工作环境,而且具有良好的耐久性。 1. Introduction Semiconductor pressure sensor is not only smaller than the original mechanical pressure sensor, high precision, low cost, but also has good responsiveness, repeatability, vibration resistance and so on. Mitsubishi’s semiconductor pressure sensor (Figure 1, PS103 and PS105 type) is to measure the intake pressure of the car engine for the main purpose, is now mass production. This structure of the sensor can adapt to the harsh working environment, but also has good durability.