A simple method is adopted to grow ZnO nanofibers laterally among the patterned seeds designed in advance on silicon substrate.The preparation of seed lattices is carried out by lithographing the metal zinc film evaporated on the substrate.A layer of aluminum is covered on the zinc layer to prevent the ZnO nanorods vertically growing on the top surface.After oxidation,the patterned ZnO/Al2O3 spots are formed at the sites for the horizontal growth of ZnO nanofibers by the vapor phase transportation(VPT) method using the zinc powders as source material. A simple method is adopted to grow ZnO nanofibers laterally among the patterned seeds designed in advance on silicon substrate. The preparation of seed lattices is carried out by lithographing the metal zinc film evaporated on the substrate. A layer of aluminum is covered on the zinc layer to prevent the ZnO nanorods vertically growing on the top surface. After oxidation, the patterned ZnO / Al2O3 spots are formed at the sites for the horizontal growth of ZnO nanofibers by the vapor phase transportation (VPT) method using the zinc powders as source material.