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1 MEMS技术和工业应用MEMS(Micro Electro Mechanical System)是一项有着广泛应用前景的应用基础技术。利用MEMS技术可以使电子设备中元器件实现微型化、低功耗以及便携性等技术要求。MEMS利用表层蚀刻技术,可实现宏观意义上的机械三维结构,使元器件生产小型化成为可能。MEMS器件主要以硅晶体为加工材料,可以类似半导体器件的生产方法,以相对较低成本批量生产。MEMS器件在当今汽车应用电子(如防撞安全气囊感应和发动机各种压力传感器)以及计算机外设(如喷墨打印机的喷墨头、计算机硬盘驱动器磁头)等方面得到广泛应用。2 MEMS制造方法2.1表面微机械加工表面微机械加工是一种“添加”工艺过程。这种方法是在一个单晶片表层的一边沉析出若干由不同材料构成的薄层。
1 MEMS technology and industrial applications MEMS (Micro Electro Mechanical System) is a wide range of application prospects based on technology. The use of MEMS technology can make the electronic components in the device miniaturization, low power consumption and portability and other technical requirements. MEMS surface etching technology can be achieved in the macro sense of the three-dimensional structure of the machine, so that component production miniaturization possible. MEMS devices are mainly made of silicon crystal for processing, which can be similar to the production of semiconductor devices, at a relatively low cost mass production. MEMS devices are widely used in today’s automotive applications electronics such as crashworthy airbag sensors and various engine pressure sensors, as well as in computer peripherals such as inkjet print heads and computer hard disk drive heads. 2 MEMS manufacturing methods 2.1 Surface micromachining Surface micromachining is a “add ” process. This method involves depositing a number of thin layers of different materials on one side of a single-wafer surface.