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NIST新开展一项计量服务 ,即对用氯化氩激发物激光产生的193nm的激光功率与能量计的校准。由于眼科手术和高分辨率的光刻技术的ArF激发物激光的广泛应用 ,需要对这些激光产生的脉冲紫外辐射进行更好的测量和建立更准确的标准。而且现在计算机的微处理器和记忆芯片
NIST is launching a new metering service, the calibration of 193 nm laser power and energy meters with argon-chloride-based excimer lasers. Due to the widespread use of ArF excimer lasers for ophthalmic surgery and high-resolution lithography, it is desirable to make better measurements and establish more accurate standards for pulsed UV radiation produced by these lasers. And now the computer’s microprocessor and memory chip