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半导体器件工艺的问题,从本质上来讲,也就是控制半导体晶体中的杂质和缺陷的问题。虽然半导体器件工艺现在已经有了突飞猛进的发展,但由于杂质和缺陷这一问题的复杂性,人们对它们与器件性能的关系的认识还是很肤浅的,在工艺上如何控制它们还存在很多问题。因此,在工艺与器件性能间还无法建立起必要的定量关系。所以,有人说半导体器件工艺现在只是一种技艺,而并非是一种科学,这实际上也就意味着人们对半导体中杂质和缺陷的认识还是很有限的,有待于深化。
The problem of semiconductor device technology, in essence, is to control the impurities and defects in the semiconductor crystal. Although the semiconductor device process has now progressed by leaps and bounds, due to the complexity of the problem of impurities and defects, people still have a superficial understanding of their relationship with device performance. There are still many problems on how to control them in the process. As a result, the necessary quantitative relationships can not be established between process and device performance. Therefore, some people say that the process of semiconductor devices is now just a skill, not a science, which in fact means that people’s understanding of impurities and defects in the semiconductor is still very limited and needs to be deepened.