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由使用说明书规定,立式接触干涉仪的分度值是经常需要根据下式算出的数值 n 来检查和加以调整的。n=(λ/2)·(K/i)式中 i 为所要选取的分度值(说明书推荐可以采用0.05微米/格,0.1微米/格或0.2微米/格);K 为可以任意选取的干涉条纹数(说明书对应于 i 推荐采用8条、16条和32条)。根据上式计算,分度值最后是由 K 个干涉条纹内包含有 n 个刻度尺间隔来决定的。对于刻度尺,只要求相邻间隔的均匀性不变化即可(材料的不稳定虽然可以造成刻度尺绝对长度的变化,但对相邻间隔均匀性的变化影响是很小的),所以影响分度值精确度的主要因素是所用滤光片波长的数值是否与实际波长相符合。
According to the instruction manual, the index of vertical contact interferometer is always checked and adjusted according to the value n calculated from the following formula. n = (λ / 2) · (K / i) where i is the index value to be selected (0.05 μm / grid, 0.1 μm / grid or 0.2 μm / grid can be recommended in the specification) The number of interference fringes (manual corresponding to i recommended 8, 16 and 32). Based on the above equation, the division value is finally determined by the inclusion of n scale intervals in K interference fringes. For the scale, it only requires that the uniformity of the adjacent intervals does not change (the instability of the material can cause the absolute length of the scale to change, but the influence on the uniformity of the adjacent intervals is very small), so the influence points The main factor of the degree of accuracy is the value of the filter wavelength used is consistent with the actual wavelength.