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采用N型重掺杂硅作为微细电火花加工对象,通过选择不同电参数(空载电压120V、160V,脉宽0.25μs、2.5μs),进行对比试验,并采用SEM方法对工件表面及加工产物的形貌进行表征和分析,研究不同脉冲能量(最小放电脉冲能量约10-7J)对加工表面及产物的影响。试验结果表明,随着单个脉冲能量的减小,放电凹坑和加工产物尺寸显著减小,加工表面质量有所提高。
N-type heavily doped silicon was used as the object of micro-EDM. By comparing different electrical parameters (no-load voltage of 120V, 160V, pulse width of 0.25μs, 2.5μs), comparative experiments were carried out. SEM and SEM were used to analyze the surface and processed products Morphology and characterization and analysis of different pulse energy (minimum discharge pulse energy of about 10-7J) on the processing of the surface and the product. The experimental results show that with the decrease of the single pulse energy, the size of the discharge pits and the processed products is significantly reduced, and the machined surface quality is improved.